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1 Ergebnisse
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Development of fabrication process for integrated micro-opt..:
Ohara, Junji
;
Kano, Kazuhiko
;
Takeuchi, Yukihiro
Sensors and Actuators A: Physical. 143 (2008) 1 - p. 77-83 , 2008
Link:
https://doi.org/10.1016/j.sna.2007.07.022
RT Journal T1
Development of fabrication process for integrated micro-optical elements on Si substrate
UL https://suche.suub.uni-bremen.de/peid=cr-10.1016_j.sna.2007.07.022&Exemplar=1&LAN=DE A1 Ohara, Junji A1 Kano, Kazuhiko A1 Takeuchi, Yukihiro PB Elsevier BV YR 2008 SN 0924-4247 JF Sensors and Actuators A: Physical VO 143 IS 1 SP 77 OP 83 LK http://dx.doi.org/https://doi.org/10.1016/j.sna.2007.07.022 DO https://doi.org/10.1016/j.sna.2007.07.022 SF ELIB - SuUB Bremen
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