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1 Ergebnisse
1
3D-encapsulated VHF MEMS resonator with high frequency stab..:
Chen, Zeji
;
Wang, Fengxiang
;
Yuan, Quan
...
Sensors and Actuators A: Physical. 286 (2019) - p. 123-132 , 2019
Link:
https://doi.org/10.1016/j.sna.2018.12.037
RT Journal T1
3D-encapsulated VHF MEMS resonator with high frequency stability and low vibration sensitivity
UL https://suche.suub.uni-bremen.de/peid=cr-10.1016_j.sna.2018.12.037&Exemplar=1&LAN=DE A1 Chen, Zeji A1 Wang, Fengxiang A1 Yuan, Quan A1 Kan, Xiao A1 Yang, Jinling A1 Zhao, Jicong A1 Yang, Fuhua PB Elsevier BV YR 2019 SN 0924-4247 JF Sensors and Actuators A: Physical VO 286 SP 123 OP 132 LK http://dx.doi.org/https://doi.org/10.1016/j.sna.2018.12.037 DO https://doi.org/10.1016/j.sna.2018.12.037 SF ELIB - SuUB Bremen
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