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High-sensitivity MEMS pressure sensor utilizing bipolar jun..:
Basov, M.
Sensors and Actuators A: Physical. 303 (2020) - p. 111705 , 2020
Link:
https://doi.org/10.1016/j.sna.2019.111705
RT Journal T1 <Title>High-sensitivity MEMS pressure sensor utilizing bipolar junction transistor with temperature compensation</Title> UL https://suche.suub.uni-bremen.de/peid=cr-10.1016_j.sna.2019.111705&Exemplar=1&LAN=DE A1 Basov, M. PB Elsevier BV YR 2020 SN 0924-4247 JF Sensors and Actuators A: Physical VO 303 SP 111705 LK http://dx.doi.org/https://doi.org/10.1016/j.sna.2019.111705 DO https://doi.org/10.1016/j.sna.2019.111705 SF ELIB - SuUB Bremen
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