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1 Ergebnisse
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Characterization of anisotropic wet etching of Gallium Nitr..:
Chen, Y.
;
Xing, Y.
;
Gong, J.T.
..
Sensors and Actuators A: Physical. 351 (2023) - p. 114176 , 2023
Link:
https://doi.org/10.1016/j.sna.2023.114176
RT Journal T1 <Title>Characterization of anisotropic wet etching of Gallium Nitride for surface orientations of the <0001> crystallographic zone in H3PO4 etchant</Title> UL https://suche.suub.uni-bremen.de/peid=cr-10.1016_j.sna.2023.114176&Exemplar=1&LAN=DE A1 Chen, Y. A1 Xing, Y. A1 Gong, J.T. A1 Li, Qi A1 Guo, X. PB Elsevier BV YR 2023 SN 0924-4247 JF Sensors and Actuators A: Physical VO 351 SP 114176 LK http://dx.doi.org/https://doi.org/10.1016/j.sna.2023.114176 DO https://doi.org/10.1016/j.sna.2023.114176 SF ELIB - SuUB Bremen
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