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1 Ergebnisse
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NDIR CO2 gas sensing using CMOS compatible MEMS ScAlN-based..:
Ng, Doris Keh Ting
;
Ho, Chong Pei
;
Xu, Linfang
...
Sensors and Actuators B: Chemical. 346 (2021) - p. 130437 , 2021
Link:
https://doi.org/10.1016/j.snb.2021.130437
RT Journal T1
NDIR CO2 gas sensing using CMOS compatible MEMS ScAlN-based pyroelectric detector
UL https://suche.suub.uni-bremen.de/peid=cr-10.1016_j.snb.2021.130437&Exemplar=1&LAN=DE A1 Ng, Doris Keh Ting A1 Ho, Chong Pei A1 Xu, Linfang A1 Chen, Weiguo A1 Fu, Yuan Hsing A1 Zhang, Tantan A1 Siow, Li Yan A1 Jaafar, Norhanani A1 Ng, Eldwin Jiaqiang A1 Gao, Yuan A1 Cai, Hong A1 Zhang, Qingxin A1 Lee, Lennon Yao Ting PB Elsevier BV YR 2021 SN 0925-4005 JF Sensors and Actuators B: Chemical VO 346 SP 130437 LK http://dx.doi.org/https://doi.org/10.1016/j.snb.2021.130437 DO https://doi.org/10.1016/j.snb.2021.130437 SF ELIB - SuUB Bremen
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