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1 Ergebnisse
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Two-dimensional electrical characterization of ultrashallow..:
Singisetti, U
;
McCartney, M.R
;
Li, J
...
Superlattices and Microstructures. 34 (2003) 3-6 - p. 301-310 , 2003
Link:
https://doi.org/10.1016/j.spmi.2004.03.020
RT Journal T1 <Title>Two-dimensional electrical characterization of ultrashallow source/drain extensions for nanoscale MOSFETs</Title> UL https://suche.suub.uni-bremen.de/peid=cr-10.1016_j.spmi.2004.03.020&Exemplar=1&LAN=DE A1 Singisetti, U A1 McCartney, M.R A1 Li, J A1 Chakraborty, P.S A1 Goodnick, S.M A1 Kozicki, M.N A1 Thornton, T.J PB Elsevier BV YR 2003 SN 0749-6036 JF Superlattices and Microstructures VO 34 IS 3-6 SP 301 OP 310 LK http://dx.doi.org/https://doi.org/10.1016/j.spmi.2004.03.020 DO https://doi.org/10.1016/j.spmi.2004.03.020 SF ELIB - SuUB Bremen
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