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Atomic layer deposition and characterization of Ga-doped Zn..:

Saito, K. ; Hiratsuka, Y. ; Omata, A....
Superlattices and Microstructures.  42 (2007)  1-6 - p. 172-175 , 2007
Link: https://doi.org/10.1016/j.spmi.2007.04.041