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1 Ergebnisse
1
Composite HfO2/Al2O3-dielectric AlGaAs/InGaAs MOS-HEMTs by ..:
Lee, Ching-Sung
;
Liao, Yu-Hao
;
Chou, Bo-Yi
..
Superlattices and Microstructures. 72 (2014) - p. 194-203 , 2014
Link:
https://doi.org/10.1016/j.spmi.2014.04.016
RT Journal T1
Composite HfO2/Al2O3-dielectric AlGaAs/InGaAs MOS-HEMTs by using RF sputtering/ozone water oxidation
UL https://suche.suub.uni-bremen.de/peid=cr-10.1016_j.spmi.2014.04.016&Exemplar=1&LAN=DE A1 Lee, Ching-Sung A1 Liao, Yu-Hao A1 Chou, Bo-Yi A1 Liu, Han-Yin A1 Hsu, Wei-Chou PB Elsevier BV YR 2014 SN 0749-6036 JF Superlattices and Microstructures VO 72 SP 194 OP 203 LK http://dx.doi.org/https://doi.org/10.1016/j.spmi.2014.04.016 DO https://doi.org/10.1016/j.spmi.2014.04.016 SF ELIB - SuUB Bremen
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