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Development of PE-CVD Si/C/N:H films for tribological and c..:

Probst, D. ; Hoche, H. ; Zhou, Y....
Surface and Coatings Technology.  200 (2005)  1-4 - p. 355-359 , 2005
Link: https://doi.org/10.1016/j.surfcoat.2005.02.111