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1 Ergebnisse
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Deposition of silicon carbon nitride thin films by microwav..:
Gao, Peng
;
Xu, Jun
;
Piao, Yong
...
Surface and Coatings Technology. 201 (2007) 9-11 - p. 5298-5301 , 2007
Link:
https://doi.org/10.1016/j.surfcoat.2006.07.197
RT Journal T1 <Title>Deposition of silicon carbon nitride thin films by microwave ECR plasma enhanced unbalance magnetron sputtering</Title> UL https://suche.suub.uni-bremen.de/peid=cr-10.1016_j.surfcoat.2006.07.197&Exemplar=1&LAN=DE A1 Gao, Peng A1 Xu, Jun A1 Piao, Yong A1 Ding, Wanyu A1 Wang, Dehe A1 Deng, Xinlu A1 Dong, Chuang PB Elsevier BV YR 2007 SN 0257-8972 JF Surface and Coatings Technology VO 201 IS 9-11 SP 5298 OP 5301 LK http://dx.doi.org/https://doi.org/10.1016/j.surfcoat.2006.07.197 DO https://doi.org/10.1016/j.surfcoat.2006.07.197 SF ELIB - SuUB Bremen
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