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Carbon film deposition by powerful ion beams:

Ryabchikov, A.I. ; Petrov, A.V. ; Polkovnikova, N.M....
Surface and Coatings Technology.  201 (2007)  19-20 - p. 8499-8502 , 2007
Link: https://doi.org/10.1016/j.surfcoat.2006.11.045