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Pulse management in high power pulsed magnetron sputtering ..:
Hála, M.
;
Čapek, J.
;
Zabeida, O.
..
Surface and Coatings Technology. 206 (2012) 19-20 - p. 4186-4193 , 2012
Link:
https://doi.org/10.1016/j.surfcoat.2012.04.019
RT Journal T1 <Title>Pulse management in high power pulsed magnetron sputtering of niobium</Title> UL https://suche.suub.uni-bremen.de/peid=cr-10.1016_j.surfcoat.2012.04.019&Exemplar=1&LAN=DE A1 Hála, M. A1 Čapek, J. A1 Zabeida, O. A1 Klemberg-Sapieha, J.E. A1 Martinu, L. PB Elsevier BV YR 2012 SN 0257-8972 JF Surface and Coatings Technology VO 206 IS 19-20 SP 4186 OP 4193 LK http://dx.doi.org/https://doi.org/10.1016/j.surfcoat.2012.04.019 DO https://doi.org/10.1016/j.surfcoat.2012.04.019 SF ELIB - SuUB Bremen
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