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Numerical estimation of intrinsic stress in physical vapor ..:
Chakraborty, Anurag
;
Anderson, Robert
;
Ahrenkiel, Scott P.
..
Surface and Coatings Technology. 350 (2018) - p. 488-495 , 2018
Link:
https://doi.org/10.1016/j.surfcoat.2018.06.073
RT Journal T1
Numerical estimation of intrinsic stress in physical vapor deposited thin-films
UL https://suche.suub.uni-bremen.de/peid=cr-10.1016_j.surfcoat.2018.06.073&Exemplar=1&LAN=DE A1 Chakraborty, Anurag A1 Anderson, Robert A1 Ahrenkiel, Scott P. A1 Kustas, Frank A1 Ash, Jason PB Elsevier BV YR 2018 SN 0257-8972 JF Surface and Coatings Technology VO 350 SP 488 OP 495 LK http://dx.doi.org/https://doi.org/10.1016/j.surfcoat.2018.06.073 DO https://doi.org/10.1016/j.surfcoat.2018.06.073 SF ELIB - SuUB Bremen
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