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Influence of the bias-voltage, the argon pressure and the h..:
Tillmann, Wolfgang
;
Wittig, Alexandra
;
Stangier, Dominic
...
Surface and Coatings Technology. 385 (2020) - p. 125358 , 2020
Link:
https://doi.org/10.1016/j.surfcoat.2020.125358
RT Journal T1
Influence of the bias-voltage, the argon pressure and the heating power on the structure and the tribological properties of HiPIMS sputtered MoSx films
UL https://suche.suub.uni-bremen.de/peid=cr-10.1016_j.surfcoat.2020.125358&Exemplar=1&LAN=DE A1 Tillmann, Wolfgang A1 Wittig, Alexandra A1 Stangier, Dominic A1 Moldenhauer, Henning A1 Thomann, Carl-Arne A1 Debus, Joerg A1 Aurich, Daniel A1 Bruemmer, Andreas PB Elsevier BV YR 2020 SN 0257-8972 JF Surface and Coatings Technology VO 385 SP 125358 LK http://dx.doi.org/https://doi.org/10.1016/j.surfcoat.2020.125358 DO https://doi.org/10.1016/j.surfcoat.2020.125358 SF ELIB - SuUB Bremen
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