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1 Ergebnisse
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Orthorhombic Ta3-xN5-yOy thin films grown by unbalanced mag..:
Chang, Jui-Che
;
Eriksson, Fredrik
;
Sortica, Mauricio A.
...
Surface and Coatings Technology. 406 (2021) - p. 126665 , 2021
Link:
https://doi.org/10.1016/j.surfcoat.2020.126665
RT Journal T1
Orthorhombic Ta3-xN5-yOy thin films grown by unbalanced magnetron sputtering: The role of oxygen on structure, composition, and optical properties
UL https://suche.suub.uni-bremen.de/peid=cr-10.1016_j.surfcoat.2020.126665&Exemplar=1&LAN=DE A1 Chang, Jui-Che A1 Eriksson, Fredrik A1 Sortica, Mauricio A. A1 Greczynski, Grzegorz A1 Bakhit, Babak A1 Hu, Zhangjun A1 Primetzhofer, Daniel A1 Hultman, Lars A1 Birch, Jens A1 Hsiao, Ching-Lien PB Elsevier BV YR 2021 SN 0257-8972 JF Surface and Coatings Technology VO 406 SP 126665 LK http://dx.doi.org/https://doi.org/10.1016/j.surfcoat.2020.126665 DO https://doi.org/10.1016/j.surfcoat.2020.126665 SF ELIB - SuUB Bremen
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