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Evolution of the microstructure of sputter deposited TaAlON..:
Schalk, Nina
;
Saringer, Christian
;
Fian, Alexander
...
Surface and Coatings Technology. 418 (2021) - p. 127237 , 2021
Link:
https://doi.org/10.1016/j.surfcoat.2021.127237
RT Journal T1
Evolution of the microstructure of sputter deposited TaAlON thin films with increasing oxygen partial pressure
UL https://suche.suub.uni-bremen.de/peid=cr-10.1016_j.surfcoat.2021.127237&Exemplar=1&LAN=DE A1 Schalk, Nina A1 Saringer, Christian A1 Fian, Alexander A1 Terziyska, Velislava L. A1 Julin, Jaakko A1 Tkadletz, Michael PB Elsevier BV YR 2021 SN 0257-8972 JF Surface and Coatings Technology VO 418 SP 127237 LK http://dx.doi.org/https://doi.org/10.1016/j.surfcoat.2021.127237 DO https://doi.org/10.1016/j.surfcoat.2021.127237 SF ELIB - SuUB Bremen
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