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The effect of the Ar/N2 gas ratio on the structure and prop..:
Sytchenko, A.D.
;
Kozlova, N.S.
;
Zabelina, E.V.
...
Surfaces and Interfaces. 37 (2023) - p. 102654 , 2023
Link:
https://doi.org/10.1016/j.surfin.2023.102654
RT Journal T1
The effect of the Ar/N2 gas ratio on the structure and properties of Ta-Si-N coatings produced by magnetron sputtering of TaSi2 target
UL https://suche.suub.uni-bremen.de/peid=cr-10.1016_j.surfin.2023.102654&Exemplar=1&LAN=DE A1 Sytchenko, A.D. A1 Kozlova, N.S. A1 Zabelina, E.V. A1 Loginov, P.A. A1 Levashov, E.A. A1 Kiryukhantsev-Korneev, Ph.V. PB Elsevier BV YR 2023 SN 2468-0230 JF Surfaces and Interfaces VO 37 SP 102654 LK http://dx.doi.org/https://doi.org/10.1016/j.surfin.2023.102654 DO https://doi.org/10.1016/j.surfin.2023.102654 SF ELIB - SuUB Bremen
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