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1 Ergebnisse
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Indirect bonding of MgO wafers based on intercalation cryst..:
Li, Zhiqiang
;
Lei, Cheng
;
Liu, Jia
...
Surfaces and Interfaces. 40 (2023) - p. 103121 , 2023
Link:
https://doi.org/10.1016/j.surfin.2023.103121
RT Journal T1
Indirect bonding of MgO wafers based on intercalation crystallisation of amorphous MgO film
UL https://suche.suub.uni-bremen.de/peid=cr-10.1016_j.surfin.2023.103121&Exemplar=1&LAN=DE A1 Li, Zhiqiang A1 Lei, Cheng A1 Liu, Jia A1 Li, Ruirui A1 Li, Fengchao A1 Liang, Ting A1 Jia, Pinggang A1 Xiong, Jijun PB Elsevier BV YR 2023 SN 2468-0230 JF Surfaces and Interfaces VO 40 SP 103121 LK http://dx.doi.org/https://doi.org/10.1016/j.surfin.2023.103121 DO https://doi.org/10.1016/j.surfin.2023.103121 SF ELIB - SuUB Bremen
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