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New class of Zr precursor containing boratabenzene ligand e..:
Ansari, Mohd Zahid
;
Janicek, Petr
;
NamGung, Sook
...
Surfaces and Interfaces. 46 (2024) - p. 104014 , 2024
Link:
https://doi.org/10.1016/j.surfin.2024.104014
RT Journal T1
New class of Zr precursor containing boratabenzene ligand enabling highly conformal wafer-scale zirconium dioxide thin films through atomic layer deposition
UL https://suche.suub.uni-bremen.de/peid=cr-10.1016_j.surfin.2024.104014&Exemplar=1&LAN=DE A1 Ansari, Mohd Zahid A1 Janicek, Petr A1 NamGung, Sook A1 Kim, Hyangil A1 Nandi, Dip K. A1 Cheon, Taehoon A1 Siddiqui, Masoom Raza A1 Imran, Muhammad A1 Jang, Yujin A1 Bae, Jong-Seong A1 Hong, Tae Eun A1 Park, Chaehyun A1 Son, Yeseul A1 Kim, Sang Bok A1 Kimj, Soo-Hyun PB Elsevier BV YR 2024 SN 2468-0230 JF Surfaces and Interfaces VO 46 SP 104014 LK http://dx.doi.org/https://doi.org/10.1016/j.surfin.2024.104014 DO https://doi.org/10.1016/j.surfin.2024.104014 SF ELIB - SuUB Bremen
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