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1 Ergebnisse
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Characterization and integration of new porous low-k dielec..:
Choi, Kyeong-Keun
;
Cho, Ihl Hyun
;
Park, Sang Jong
...
Thin Solid Films. 515 (2007) 12 - p. 5025-5030 , 2007
Link:
https://doi.org/10.1016/j.tsf.2006.10.096
RT Journal T1
Characterization and integration of new porous low-k dielectric (k<2.3) for 65 nm technology and beyond
UL https://suche.suub.uni-bremen.de/peid=cr-10.1016_j.tsf.2006.10.096&Exemplar=1&LAN=DE A1 Choi, Kyeong-Keun A1 Cho, Ihl Hyun A1 Park, Sang Jong A1 Lim, Jung Eun A1 Jung, Oh Jin A1 Park, Jong Hyuk A1 Min, Byung Seung A1 Hwang, Sung Bo A1 Ko, Min Jin A1 Lee, Jeong Gun PB Elsevier BV YR 2007 SN 0040-6090 JF Thin Solid Films VO 515 IS 12 SP 5025 OP 5030 LK http://dx.doi.org/https://doi.org/10.1016/j.tsf.2006.10.096 DO https://doi.org/10.1016/j.tsf.2006.10.096 SF ELIB - SuUB Bremen
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