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Performance and quality analysis of Mo–Si multilayers forme..:
Hiruma, Kenji
;
Miyagaki, Shinji
;
Yamanashi, Hiromasa
..
Thin Solid Films. 516 (2008) 8 - p. 2050-2057 , 2008
Link:
https://doi.org/10.1016/j.tsf.2007.07.182
RT Journal T1
Performance and quality analysis of Mo–Si multilayers formed by ion-beam and magnetron sputtering for extreme ultraviolet lithography
UL https://suche.suub.uni-bremen.de/peid=cr-10.1016_j.tsf.2007.07.182&Exemplar=1&LAN=DE A1 Hiruma, Kenji A1 Miyagaki, Shinji A1 Yamanashi, Hiromasa A1 Tanaka, Yuusuke A1 Nishiyama, Iwao PB Elsevier BV YR 2008 SN 0040-6090 JF Thin Solid Films VO 516 IS 8 SP 2050 OP 2057 LK http://dx.doi.org/https://doi.org/10.1016/j.tsf.2007.07.182 DO https://doi.org/10.1016/j.tsf.2007.07.182 SF ELIB - SuUB Bremen
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