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1 Ergebnisse
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Growth of silicon carbide thin films by hot-wire chemical v..:
Tabata, Akimori
;
Komura, Yusuke
;
Narita, Tomoki
.
Thin Solid Films. 517 (2009) 12 - p. 3516-3519 , 2009
Link:
https://doi.org/10.1016/j.tsf.2009.01.042
RT Journal T1
Growth of silicon carbide thin films by hot-wire chemical vapor deposition from SiH4/CH4/H2
UL https://suche.suub.uni-bremen.de/peid=cr-10.1016_j.tsf.2009.01.042&Exemplar=1&LAN=DE A1 Tabata, Akimori A1 Komura, Yusuke A1 Narita, Tomoki A1 Kondo, Akihiro PB Elsevier BV YR 2009 SN 0040-6090 JF Thin Solid Films VO 517 IS 12 SP 3516 OP 3519 LK http://dx.doi.org/https://doi.org/10.1016/j.tsf.2009.01.042 DO https://doi.org/10.1016/j.tsf.2009.01.042 SF ELIB - SuUB Bremen
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