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1 Ergebnisse
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Nano-scratch evaluations of copper chemical mechanical poli..:
Fu, Wei-En
;
Chen, Chao-Chang A.
;
Huang, Kuo-Wei
...
Thin Solid Films. 529 (2013) - p. 306-311 , 2013
Link:
https://doi.org/10.1016/j.tsf.2012.03.057
RT Journal T1
Nano-scratch evaluations of copper chemical mechanical polishing
UL https://suche.suub.uni-bremen.de/peid=cr-10.1016_j.tsf.2012.03.057&Exemplar=1&LAN=DE A1 Fu, Wei-En A1 Chen, Chao-Chang A. A1 Huang, Kuo-Wei A1 Chang, Yong-Qing A1 Lin, Tzeng-Yow A1 Chang, Chi-Sheng A1 Chen, Jay-San PB Elsevier BV YR 2013 SN 0040-6090 JF Thin Solid Films VO 529 SP 306 OP 311 LK http://dx.doi.org/https://doi.org/10.1016/j.tsf.2012.03.057 DO https://doi.org/10.1016/j.tsf.2012.03.057 SF ELIB - SuUB Bremen
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