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Growth of thin Al2O3 films on biaxially oriented polymer fi..:
Vähä-Nissi, Mika
;
Kauppi, Emilia
;
Sahagian, Khoren
...
Thin Solid Films. 522 (2012) - p. 50-57 , 2012
Link:
https://doi.org/10.1016/j.tsf.2012.09.043
RT Journal T1
Growth of thin Al2O3 films on biaxially oriented polymer films by atomic layer deposition
UL https://suche.suub.uni-bremen.de/peid=cr-10.1016_j.tsf.2012.09.043&Exemplar=1&LAN=DE A1 Vähä-Nissi, Mika A1 Kauppi, Emilia A1 Sahagian, Khoren A1 Johansson, Leena-Sisko A1 Peresin, Maria Soledad A1 Sievänen, Jenni A1 Harlin, Ali PB Elsevier BV YR 2012 SN 0040-6090 JF Thin Solid Films VO 522 SP 50 OP 57 LK http://dx.doi.org/https://doi.org/10.1016/j.tsf.2012.09.043 DO https://doi.org/10.1016/j.tsf.2012.09.043 SF ELIB - SuUB Bremen
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