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1 Ergebnisse
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Comparison of chlorine- and fluorine-based inductively coup..:
Park, Jong Cheon
;
Jeong, Ok Geun
;
Kim, Jin Kon
...
Thin Solid Films. 546 (2013) - p. 136-140 , 2013
Link:
https://doi.org/10.1016/j.tsf.2013.05.031
RT Journal T1
Comparison of chlorine- and fluorine-based inductively coupled plasmas for dry etching of InGaZnO4 films
UL https://suche.suub.uni-bremen.de/peid=cr-10.1016_j.tsf.2013.05.031&Exemplar=1&LAN=DE A1 Park, Jong Cheon A1 Jeong, Ok Geun A1 Kim, Jin Kon A1 Yun, Young-Hoon A1 Pearton, Stephen J. A1 Cho, Hyun PB Elsevier BV YR 2013 SN 0040-6090 JF Thin Solid Films VO 546 SP 136 OP 140 LK http://dx.doi.org/https://doi.org/10.1016/j.tsf.2013.05.031 DO https://doi.org/10.1016/j.tsf.2013.05.031 SF ELIB - SuUB Bremen
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