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1 Ergebnisse
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Environmental reliability and moisture barrier properties o..:
Lee, Won Jae
;
Cho, Tae-Yeon
;
Choa, Sung-Hoon
.
Thin Solid Films. 720 (2021) - p. 138524 , 2021
Link:
https://doi.org/10.1016/j.tsf.2021.138524
RT Journal T1
Environmental reliability and moisture barrier properties of silicon nitride and silicon oxide films using roll-to-roll plasma enhanced chemical vapor deposition
UL https://suche.suub.uni-bremen.de/peid=cr-10.1016_j.tsf.2021.138524&Exemplar=1&LAN=DE A1 Lee, Won Jae A1 Cho, Tae-Yeon A1 Choa, Sung-Hoon A1 Cho, Seong-Keun PB Elsevier BV YR 2021 SN 0040-6090 JF Thin Solid Films VO 720 SP 138524 LK http://dx.doi.org/https://doi.org/10.1016/j.tsf.2021.138524 DO https://doi.org/10.1016/j.tsf.2021.138524 SF ELIB - SuUB Bremen
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