I agree that this site is using cookies. You can find further informations
here
.
X
Login
Merkliste (
0
)
Home
About us
Home About us
Our history
Profile
Press & public relations
Friends
The library in figures
Exhibitions
Projects
Training, internships, careers
Films
Services & Information
Home Services & Information
Lending and interlibrary loans
Returns and renewals
Training and library tours
My Account
Library cards
New to the library?
Download Information
Opening hours
Learning spaces
PC, WLAN, copy, scan and print
Catalogs and collections
Home Catalogs and Collections
Rare books and manuscripts
Digital collections
Subject Areas
Our sites
Home Our sites
Central Library
Law Library (Juridicum)
BB Business and Economics (BB11)
BB Physics and Electrical Engineering
TB Engineering and Social Sciences
TB Economics and Nautical Sciences
TB Music
TB Art & Design
TB Bremerhaven
Contact the library
Home Contact the library
Staff Directory
Open access & publishing
Home Open access & publishing
Reference management: Citavi & RefWorks
Publishing documents
Open Access in Bremen
zur Desktop-Version
Toggle navigation
Merkliste
1 Ergebnisse
1
Ultralow dielectric constant SiCOH films by plasma enhanced..:
Park, Yoonsoo
;
Lim, Hyuna
;
Kwon, Sungyool
...
Thin Solid Films. 727 (2021) - p. 138680 , 2021
Link:
https://doi.org/10.1016/j.tsf.2021.138680
RT Journal T1
Ultralow dielectric constant SiCOH films by plasma enhanced chemical vapor deposition of decamethylcyclopentasiloxane and tetrakis(trimethylsilyloxy)silane precursors
UL https://suche.suub.uni-bremen.de/peid=cr-10.1016_j.tsf.2021.138680&Exemplar=1&LAN=DE A1 Park, Yoonsoo A1 Lim, Hyuna A1 Kwon, Sungyool A1 Ban, Wonjin A1 Jang, Seonhee A1 Jung, Donggeun PB Elsevier BV YR 2021 SN 0040-6090 JF Thin Solid Films VO 727 SP 138680 LK http://dx.doi.org/https://doi.org/10.1016/j.tsf.2021.138680 DO https://doi.org/10.1016/j.tsf.2021.138680 SF ELIB - SuUB Bremen
Export
RefWorks (nur Desktop-Version!)
Flow
(Zuerst in
Flow
einloggen, dann importieren)