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1 Ergebnisse
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Ion- and temperature-induced 3-dimensional nanoscale patter..:
Warres, Clementine
;
Meyer, J.C.
;
Lutz, T.
...
Thin Solid Films. 781 (2023) - p. 139977 , 2023
Link:
https://doi.org/10.1016/j.tsf.2023.139977
RT Journal T1
Ion- and temperature-induced 3-dimensional nanoscale patterning in Ti1-xAlxN deposited by High Power Impulse Magnetron Sputtering
UL https://suche.suub.uni-bremen.de/peid=cr-10.1016_j.tsf.2023.139977&Exemplar=1&LAN=DE A1 Warres, Clementine A1 Meyer, J.C. A1 Lutz, T. A1 Albrecht, P. A1 Schröppel, B. A1 Engelhart, W. A1 Kümmel, J. PB Elsevier BV YR 2023 SN 0040-6090 JF Thin Solid Films VO 781 SP 139977 LK http://dx.doi.org/https://doi.org/10.1016/j.tsf.2023.139977 DO https://doi.org/10.1016/j.tsf.2023.139977 SF ELIB - SuUB Bremen
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