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1 Ergebnisse
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Effects of deposition temperature on the mechanical and str..:
Karlsson, Stefan
;
Eklund, Per
;
Österlund, Lars
..
Thin Solid Films. 787 (2023) - p. 140135 , 2023
Link:
https://doi.org/10.1016/j.tsf.2023.140135
RT Journal T1
Effects of deposition temperature on the mechanical and structural properties of amorphous Al–Si–O thin films prepared by radio frequency magnetron sputtering
UL https://suche.suub.uni-bremen.de/peid=cr-10.1016_j.tsf.2023.140135&Exemplar=1&LAN=DE A1 Karlsson, Stefan A1 Eklund, Per A1 Österlund, Lars A1 Birch, Jens A1 Ali, Sharafat PB Elsevier BV YR 2023 SN 0040-6090 JF Thin Solid Films VO 787 SP 140135 LK http://dx.doi.org/https://doi.org/10.1016/j.tsf.2023.140135 DO https://doi.org/10.1016/j.tsf.2023.140135 SF ELIB - SuUB Bremen
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