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1 Ergebnisse
1
Nitrogen ratio and RTA optimization on sputtered TiN/SiO2/S..:
Ren, Chang
;
Yang, Chia-Ming
;
Lyu, Chengang
...
Vacuum. 118 (2015) - p. 113-117 , 2015
Link:
https://doi.org/10.1016/j.vacuum.2015.02.025
RT Journal T1
Nitrogen ratio and RTA optimization on sputtered TiN/SiO2/Si electrolyte-insulator–semiconductor structure for pH sensing characteristics
UL https://suche.suub.uni-bremen.de/peid=cr-10.1016_j.vacuum.2015.02.025&Exemplar=1&LAN=DE A1 Ren, Chang A1 Yang, Chia-Ming A1 Lyu, Chengang A1 Hsu, Chin-Yuan A1 Chen, Tsung-Cheng A1 Wang, Hau-Cheng A1 Yang, Hao A1 Lin, Wei-Tse A1 Juan, Pi-Chun A1 Huang, Chi-Hsien A1 Pijanowska, Dorota G. A1 Wang, Jer-Chyi A1 Tsai, Jung-Ruey PB Elsevier BV YR 2015 SN 0042-207X JF Vacuum VO 118 SP 113 OP 117 LK http://dx.doi.org/https://doi.org/10.1016/j.vacuum.2015.02.025 DO https://doi.org/10.1016/j.vacuum.2015.02.025 SF ELIB - SuUB Bremen
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