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Study of the formation mechanism of hierarchical silicon st..:
Punzón-Quijorna, Esther
;
Kajari-Shröder, Sarah
;
Agulló-Rueda, Fernando
...
Vacuum. 138 (2017) - p. 238-243 , 2017
Link:
https://doi.org/10.1016/j.vacuum.2016.10.011
RT Journal T1
Study of the formation mechanism of hierarchical silicon structures produced by sequential ion beam irradiation and anodic etching
UL https://suche.suub.uni-bremen.de/peid=cr-10.1016_j.vacuum.2016.10.011&Exemplar=1&LAN=DE A1 Punzón-Quijorna, Esther A1 Kajari-Shröder, Sarah A1 Agulló-Rueda, Fernando A1 Manso Silván, Miguel A1 Martín-Palma, Raul José A1 Herrero Fernández, Pilar A1 Torres-Costa, Vicente A1 Climent-Font, Aurelio PB Elsevier BV YR 2017 SN 0042-207X JF Vacuum VO 138 SP 238 OP 243 LK http://dx.doi.org/https://doi.org/10.1016/j.vacuum.2016.10.011 DO https://doi.org/10.1016/j.vacuum.2016.10.011 SF ELIB - SuUB Bremen
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