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1 Ergebnisse
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Plasma enhanced atomic layer deposited platinum thin film o..:
Shi, Mao-Lin
;
Xu, Jing
;
Dai, Ya-Wei
...
Vacuum. 140 (2017) - p. 139-143 , 2017
Link:
https://doi.org/10.1016/j.vacuum.2016.12.015
RT Journal T1
Plasma enhanced atomic layer deposited platinum thin film on Si substrate with TMA pretreatment
UL https://suche.suub.uni-bremen.de/peid=cr-10.1016_j.vacuum.2016.12.015&Exemplar=1&LAN=DE A1 Shi, Mao-Lin A1 Xu, Jing A1 Dai, Ya-Wei A1 Cao, Qian A1 Chen, Lin A1 Sun, Qing-Qing A1 Zhou, Peng A1 Ding, Shi-Jin A1 Zhang, David Wei PB Elsevier BV YR 2017 SN 0042-207X JF Vacuum VO 140 SP 139 OP 143 LK http://dx.doi.org/https://doi.org/10.1016/j.vacuum.2016.12.015 DO https://doi.org/10.1016/j.vacuum.2016.12.015 SF ELIB - SuUB Bremen
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