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Study of self-masking nanostructuring of boron doped diamon..:
Marton, Marian
;
Ritomsky, Mario
;
Michniak, Pavol
...
Vacuum. 170 (2019) - p. 108954 , 2019
Link:
https://doi.org/10.1016/j.vacuum.2019.108954
RT Journal T1
Study of self-masking nanostructuring of boron doped diamond films by RF plasma etching
UL https://suche.suub.uni-bremen.de/peid=cr-10.1016_j.vacuum.2019.108954&Exemplar=1&LAN=DE A1 Marton, Marian A1 Ritomsky, Mario A1 Michniak, Pavol A1 Behul, Miroslav A1 Rehacek, Vlastimil A1 Redhammer, Robert A1 Vincze, Andrej A1 Papula, Martin A1 Vojs, Marian PB Elsevier BV YR 2019 SN 0042-207X JF Vacuum VO 170 SP 108954 LK http://dx.doi.org/https://doi.org/10.1016/j.vacuum.2019.108954 DO https://doi.org/10.1016/j.vacuum.2019.108954 SF ELIB - SuUB Bremen
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