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1 Ergebnisse
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Polycrystalline and high purity SnO2 films by plasma-enhanc..:
Won, Jong Hyeon
;
Choi, Heenang
;
Han, Seong Ho
...
Vacuum. 196 (2022) - p. 110739 , 2022
Link:
https://doi.org/10.1016/j.vacuum.2021.110739
RT Journal T1
Polycrystalline and high purity SnO2 films by plasma-enhanced atomic layer deposition using H2O plasma at very low temperatures of 60–90 °C
UL https://suche.suub.uni-bremen.de/peid=cr-10.1016_j.vacuum.2021.110739&Exemplar=1&LAN=DE A1 Won, Jong Hyeon A1 Choi, Heenang A1 Han, Seong Ho A1 Park, Bo Keun A1 Chung, Taek-Mo A1 Han, Jeong Hwan PB Elsevier BV YR 2022 SN 0042-207X JF Vacuum VO 196 SP 110739 LK http://dx.doi.org/https://doi.org/10.1016/j.vacuum.2021.110739 DO https://doi.org/10.1016/j.vacuum.2021.110739 SF ELIB - SuUB Bremen
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