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1 Ergebnisse
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Effect of target grain size on target sputter etching morph..:
Wang, Shuai-Kang
;
Yang, Wen-Hao
;
Wang, Yu-Peng
...
Vacuum. 201 (2022) - p. 111083 , 2022
Link:
https://doi.org/10.1016/j.vacuum.2022.111083
RT Journal T1
Effect of target grain size on target sputter etching morphology and performance
UL https://suche.suub.uni-bremen.de/peid=cr-10.1016_j.vacuum.2022.111083&Exemplar=1&LAN=DE A1 Wang, Shuai-Kang A1 Yang, Wen-Hao A1 Wang, Yu-Peng A1 Zhao, Guo-Hua A1 Zhan, Shang-Song A1 Wang, Duo A1 Tang, Bin A1 Bao, Ming-Dong PB Elsevier BV YR 2022 SN 0042-207X JF Vacuum VO 201 SP 111083 LK http://dx.doi.org/https://doi.org/10.1016/j.vacuum.2022.111083 DO https://doi.org/10.1016/j.vacuum.2022.111083 SF ELIB - SuUB Bremen
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