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Structural characteristics of 3C–SiC thin films grown on Si..:
Feng, Zhe Chuan
;
Lin, Hao-Hsiung
;
Xin, Bin
...
Vacuum. 207 (2023) - p. 111643 , 2023
Link:
https://doi.org/10.1016/j.vacuum.2022.111643
RT Journal T1
Structural characteristics of 3C–SiC thin films grown on Si-face and C-face 4H–SiC substrates by high temperature chemical vapor deposition
UL https://suche.suub.uni-bremen.de/peid=cr-10.1016_j.vacuum.2022.111643&Exemplar=1&LAN=DE A1 Feng, Zhe Chuan A1 Lin, Hao-Hsiung A1 Xin, Bin A1 Tsai, Shi-Jane A1 Saravade, Vishal A1 Yiin, Jeffrey A1 Klein, Benjamin A1 Ferguson, Ian T. PB Elsevier BV YR 2023 SN 0042-207X JF Vacuum VO 207 SP 111643 LK http://dx.doi.org/https://doi.org/10.1016/j.vacuum.2022.111643 DO https://doi.org/10.1016/j.vacuum.2022.111643 SF ELIB - SuUB Bremen
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