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1 Ergebnisse
1
HiPIMS-grown AlN buffer for threading dislocation reduction..:
Chang, Jui-Che
;
Tseng, Eric Nestor
;
Lo, Yi-Ling
...
Vacuum. 217 (2023) - p. 112553 , 2023
Link:
https://doi.org/10.1016/j.vacuum.2023.112553
RT Journal T1
HiPIMS-grown AlN buffer for threading dislocation reduction in DC-magnetron sputtered GaN epifilm on sapphire substrate
UL https://suche.suub.uni-bremen.de/peid=cr-10.1016_j.vacuum.2023.112553&Exemplar=1&LAN=DE A1 Chang, Jui-Che A1 Tseng, Eric Nestor A1 Lo, Yi-Ling A1 Nayak, Sanjay A1 Lundin, Daniel A1 Persson, Per O.Å. A1 Horng, Ray-Hua A1 Hultman, Lars A1 Birch, Jens A1 Hsiao, Ching-Lien PB Elsevier BV YR 2023 SN 0042-207X JF Vacuum VO 217 SP 112553 LK http://dx.doi.org/https://doi.org/10.1016/j.vacuum.2023.112553 DO https://doi.org/10.1016/j.vacuum.2023.112553 SF ELIB - SuUB Bremen
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