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Formation process of grown-in defects in Czochralski grown ..:
Nakamura, Kozo
;
Saishoji, Toshiaki
;
Kubota, Toshimichi
...
Journal of Crystal Growth. 180 (1997) 1 - p. 61-72 , 1997
Link:
https://doi.org/10.1016/s0022-0248(97)00206-6
RT Journal T1 <Title>Formation process of grown-in defects in Czochralski grown silicon crystals</Title> UL https://suche.suub.uni-bremen.de/peid=cr-10.1016_s0022-0248(97)00206-6&Exemplar=1&LAN=DE A1 Nakamura, Kozo A1 Saishoji, Toshiaki A1 Kubota, Toshimichi A1 Iida, Tetsuhiro A1 Shimanuki, Yoshiyuki A1 Kotooka, Toshirou A1 Tomioka, Junsuke PB Elsevier BV YR 1997 SN 0022-0248 JF Journal of Crystal Growth VO 180 IS 1 SP 61 OP 72 LK http://dx.doi.org/https://doi.org/10.1016/s0022-0248(97)00206-6 DO https://doi.org/10.1016/s0022-0248(97)00206-6 SF ELIB - SuUB Bremen
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