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1 Ergebnisse
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Plasma effects of fluorine implantation on As+-doped polycr..:
Liou, Bor Wen
;
Lee, Chung Len
Thin Solid Films. 379 (2000) 1-2 - p. 213-217 , 2000
Link:
https://doi.org/10.1016/s0040-6090(00)01188-3
RT Journal T1
Plasma effects of fluorine implantation on As+-doped polycrystalline silicon thin films of various thicknesses
UL https://suche.suub.uni-bremen.de/peid=cr-10.1016_s0040-6090(00)01188-3&Exemplar=1&LAN=DE A1 Liou, Bor Wen A1 Lee, Chung Len PB Elsevier BV YR 2000 SN 0040-6090 JF Thin Solid Films VO 379 IS 1-2 SP 213 OP 217 LK http://dx.doi.org/https://doi.org/10.1016/s0040-6090(00)01188-3 DO https://doi.org/10.1016/s0040-6090(00)01188-3 SF ELIB - SuUB Bremen
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