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Silicon surface processing techniques for micro-systems fab..:
Mizeikis, Vygantas
;
Juodkazis, Saulius
;
Ye, Jia-Yu
...
Thin Solid Films. 438-439 (2003) - p. 445-451 , 2003
Link:
https://doi.org/10.1016/s0040-6090(03)00803-4
RT Journal T1
Silicon surface processing techniques for micro-systems fabrication
UL https://suche.suub.uni-bremen.de/peid=cr-10.1016_s0040-6090(03)00803-4&Exemplar=1&LAN=DE A1 Mizeikis, Vygantas A1 Juodkazis, Saulius A1 Ye, Jia-Yu A1 Rode, Andrei A1 Matsuo, Shigeki A1 Misawa, Hiroaki PB Elsevier BV YR 2003 SN 0040-6090 JF Thin Solid Films VO 438-439 SP 445 OP 451 LK http://dx.doi.org/https://doi.org/10.1016/s0040-6090(03)00803-4 DO https://doi.org/10.1016/s0040-6090(03)00803-4 SF ELIB - SuUB Bremen
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