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Excimer laser annealed poly-Si thin film transistor with se..:
Kim, Yong-Hae
;
Hwang, Chi-Sun
;
Song, Yoon-Ho
...
Thin Solid Films. 440 (2003) 1-2 - p. 169-173 , 2003
Link:
https://doi.org/10.1016/s0040-6090(03)00853-8
RT Journal T1
Excimer laser annealed poly-Si thin film transistor with self-aligned lightly doped drain structure
UL https://suche.suub.uni-bremen.de/peid=cr-10.1016_s0040-6090(03)00853-8&Exemplar=1&LAN=DE A1 Kim, Yong-Hae A1 Hwang, Chi-Sun A1 Song, Yoon-Ho A1 Chung, Choong-Heui A1 Ko, Young-Wook A1 Sohn, Choong-Yong A1 Kim, Bong-Chul A1 Lee, Jin Ho PB Elsevier BV YR 2003 SN 0040-6090 JF Thin Solid Films VO 440 IS 1-2 SP 169 OP 173 LK http://dx.doi.org/https://doi.org/10.1016/s0040-6090(03)00853-8 DO https://doi.org/10.1016/s0040-6090(03)00853-8 SF ELIB - SuUB Bremen
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