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1 Ergebnisse
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Experimental and theoretical study of step coverage in meta..:
Yun, Jong-Ho
;
Rhee, Shi-Woo
Thin Solid Films. 292 (1997) 1-2 - p. 324-329 , 1997
Link:
https://doi.org/10.1016/s0040-6090(96)09078-5
RT Journal T1
Experimental and theoretical study of step coverage in metal-organic chemical vapor deposition of tantalum oxide thin films
UL https://suche.suub.uni-bremen.de/peid=cr-10.1016_s0040-6090(96)09078-5&Exemplar=1&LAN=DE A1 Yun, Jong-Ho A1 Rhee, Shi-Woo PB Elsevier BV YR 1997 SN 0040-6090 JF Thin Solid Films VO 292 IS 1-2 SP 324 OP 329 LK http://dx.doi.org/https://doi.org/10.1016/s0040-6090(96)09078-5 DO https://doi.org/10.1016/s0040-6090(96)09078-5 SF ELIB - SuUB Bremen
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