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Evaluation of micromechanical properties of buckled SiOxNy-..:
Józwik, Michal
;
Gorecki, Christophe
;
Sabac, Andrei
..
Optics and Lasers in Engineering. 41 (2004) 5 - p. 703-716 , 2004
Link:
https://doi.org/10.1016/s0143-8166(03)00027-7
RT Journal T1
Evaluation of micromechanical properties of buckled SiOxNy-loaded membranes by combining the Twyman–Green interferometry with nanoindentation and point-wise deflection technique
UL https://suche.suub.uni-bremen.de/peid=cr-10.1016_s0143-8166(03)00027-7&Exemplar=1&LAN=DE A1 Józwik, Michal A1 Gorecki, Christophe A1 Sabac, Andrei A1 Delobelle, Patrick A1 Kujawińska, Małgorzata PB Elsevier BV YR 2004 SN 0143-8166 JF Optics and Lasers in Engineering VO 41 IS 5 SP 703 OP 716 LK http://dx.doi.org/https://doi.org/10.1016/s0143-8166(03)00027-7 DO https://doi.org/10.1016/s0143-8166(03)00027-7 SF ELIB - SuUB Bremen
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