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On the formation of concentration profiles by low-energy io..:

Zexian, Cao ; Oechsner, Hans
Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms.  170 (2000)  1-2 - p. 53-61 , 2000
Link: https://doi.org/10.1016/s0168-583x(00)00069-0