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Optical and structural properties of 6H–SiC implanted with ..:

Héliou, R ; Brebner, J.L ; Roorda, S
Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms.  175-177 (2001)  - p. 268-273 , 2001
Link: https://doi.org/10.1016/s0168-583x(00)00633-9