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Determination of ion incidence angles in plasma immersion i..:

Galonska, M ; Gabor, Ch ; Thomae, R.W...
Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms.  175-177 (2001)  - p. 658-662 , 2001
Link: https://doi.org/10.1016/s0168-583x(00)00653-4