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Geometric considerations relevant to hydrogen depth profili..:

Verda, R.D ; Tesmer, J.R ; Maggiore, C.J..
Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms.  183 (2001)  3-4 - p. 391-400 , 2001
Link: https://doi.org/10.1016/s0168-583x(01)00634-6