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Depth profiling of hydrogen in crystalline silicon using el..:

Verda, R.D. ; Maggiore, C.J. ; Tesmer, J.R....
Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms.  183 (2001)  3-4 - p. 401-412 , 2001
Link: https://doi.org/10.1016/s0168-583x(01)00635-8