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Ion beam analysis of ion-assisted deposited amorphous GaN:

Kennedy, V.J. ; Markwitz, A. ; Lanke, U.D....
Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms.  190 (2002)  1-4 - p. 620-624 , 2002
Link: https://doi.org/10.1016/s0168-583x(01)01279-4