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Materials for LiGA and LiGA-based microsystems:

Hormes, J. ; Göttert, J. ; Lian, K...
Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms.  199 (2003)  - p. 332-341 , 2003
Link: https://doi.org/10.1016/s0168-583x(02)01571-9